sMoiré (STEM Moiré Analysis) analyzes STEM Moiré images using geometric phase analysis (GPA) technique (see GPA plug-in) and gives a fully two-dimensional strain map over a wide field of view with high accuracy.
If you have an experience on electron holography using a bi-prism, you can get a fully two-dimensional strain map over a similar field of view and accuracy using dark-field Holography (see HoloDark plug-in), which is also based on the GPA technique.
References and Technical Notes (*Basic Readings)
- * Akimitsu Ishizuka, Martin Hytch and Kazuo Ishizuka: STEM moiré analysis for 2D strain measurements, Microscopy 66 (2017) 217-221.
- D. Su and Y. Zhu: Scanning moiré fringe imaging by scanning transmission electron microscopy, Ultramicroscopy 110 (2010) 229-233.
- S. Kim, S. Lee, et al.: Scanning moiré fringe imaging for quantitative strain mapping in semiconductor devices, Applied Physics Letters 102, 161604 (2013).
Examples (Sample Data)
Download
You have to purchase a license (hardware key) to run this program.
Please send your price enquiry to support@hremresearch.com.
- sMoire v1.3.4
for GMS 3.6 (64bit)*
for GMS 3.5 (64bit)*
for GMS 3.4 (64bit)*
for GMS 3.3 (64bit)*
for GMS 3.2 (64bit)* (applicable from GMS 3.0)
for GMS 2.3 64bit
for GMS 2.1 64bit (applicable from GMS 2.0)
Required plug-ins.
- IPU plug-in (Free Software)
- HREM Mouse plug-in (Free Software)
- Acquire Image Series plug-in(Free Software
User Key Driver
Previous versions
- sMoire v1.3.2
for GMS 3.5 (64bit)*
for GMS 3.4 (64bit)*
for GMS 3.3 (64bit)*
for GMS 3.2 (64bit)* (applicable from GMS 3.0)
for GMS 2.3 32bit GMS 2.3 64bit
for GMS 2.1 32bit GMS 2.1 64bit (applicable from GMS 2.0)
for GMS 1.x (32bit)
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